TY  - JOUR
AU  - Misakian, Martin
AU  - Benck, Eric
AU  - Wang, Yicheng
C2  - Journal of Applied Physics
DA  - 2000-10-01 00:10:00
LA  - en
M1  - 88
PB  - Journal of Applied Physics
PY  - 2000
TI  - Time Evolution of Ion Energy Distributions and Optical Emission in Pulsed Inductively Coupled Radio Frequency Plasmas
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28915
ER  -