TY  - CONF
AU  - Hacker, Christina
AU  - Richter, Curt
AU  - Richter, Lee
C2  - Characterization and Metrology for ULSI Technology, Richardson, TX, USA
DA  - 2005-09-28 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology, Richardson, TX, USA
PY  - 2005
TI  - IR Spectroscopic Characterization of the Buried Metal Interface of Metal-Molecule-Silicon Vertical Diodes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31935
ER  -