TY  - JOUR
AU  - Jaeger, Rolf
AU  - Alamo, Jesus Del
AU  - Fukuta, Masumi
AU  - Bennett, Herbert
AU  - Snowden, Christopher
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2003-08-01 00:08:00
LA  - en
M1  - 16
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2003
TI  - Special Section on Compound Semiconductor Microelectronics Manufacturing: The Future Is Here
ER  -