TY  - SER
AU  - Larrabee, Robert
AU  - Linholm, Loren
AU  - Postek, Michael
C2  - Noyes Publications, Park Ridge, IL
DA  - 1991-12-01 00:12:00
LA  - en
PB  - Noyes Publications, Park Ridge, IL
PY  - 1991
TI  - Submicrometer Critical Dimensional Metrology
ER  -