TY  - CONF
AU  - Ozgur, Mehmet
AU  - Zaghloul, Mona
AU  - Gaitan, Michael
C2  - Proc., 1999 IEEE International Symposium on Circuits and Systems, Orlando, FL, USA
DA  - 1999-08-01 00:08:00
LA  - en
PB  - Proc., 1999 IEEE International Symposium on Circuits and Systems, Orlando, FL, USA
PY  - 1999
TI  - High Q Backside Micromachined CMOS Inductors
ER  -