TY  - JOUR
AU  - Goyettes, Amanda
AU  - Wang, Yicheng
AU  - Olthoff, James
C2  - Journal of Physics D-Applied Physics
DA  - 2000-08-01 00:08:00
LA  - en
M1  - 33
PB  - Journal of Physics D-Applied Physics
PY  - 2000
TI  - Inductively Coupled Plasmas in Low Global Warming Potential Gases
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=29982
ER  -