TY  - JOUR
AU  - Yang, Jihui
AU  - Kopanski, Joseph
AU  - Postula, A
AU  - Bialkowski, M
C2  - Microelectronics Reliability
DA  - 2004-12-20 00:12:00
LA  - en
M1  - 45
PB  - Microelectronics Reliability
PY  - 2004
TI  - Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31737
ER  -