TY  - JOUR
AU  - Parameswaran, M.
AU  - Robinson, A.
AU  - Blackburn, David
AU  - Gaitan, Michael
AU  - Geist, Jon
C2  - IEEE Electron Device Letters
DA  - 1991-02-01 00:02:00
LA  - en
M1  - 12
PB  - IEEE Electron Device Letters
PY  - 1991
TI  - Micromachined Thermal Radiation Emitter from a Commercial CMOS Process
ER  -