TY  - CONF
AU  - Schneir, J
AU  - Mcwaid, T
AU  - Vorburger, Theodore
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 1994-05-01 00:05:00
LA  - en
M1  - 2196
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 1994
TI  - An Instrument for Calibrating Atomic Force Microscope Standards
ER  -