TY  - CONF
AU  - Linholm, L
AU  - Allen, Robert
AU  - Cresswell, Michael
AU  - Ghoshtagore, Rathindra
AU  - Mayo, S
AU  - Schafft, H
AU  - Kramar, John
C2  - Proceedings of IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
DA  - 1995-01-01 00:01:00
LA  - en
PB  - Proceedings of IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
PY  - 1995
TI  - Measurement of Patterned Film Linewidth for Interconnect Characterization
ER  -