TY  - CONF
AU  - Koning, R
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Tsai, V
AU  - Vorburger, Theodore
AU  - Williams, Edwin
AU  - Wang, X
C2  - Proceedings of 2nd Seminar on Quantitative Microscopy, , PTB Report F-30, K. Hasche, W. Mirande, and G. Wilkening, Editors, PTB Braunschweig, 1, GE
DA  - 1997-01-01 00:01:00
LA  - en
PB  - Proceedings of 2nd Seminar on Quantitative Microscopy, , PTB Report F-30, K. Hasche, W. Mirande, and G. Wilkening, Editors, PTB Braunschweig, 1, GE
PY  - 1997
TI  - Pitch and Step Height Measurements Using NIST
ER  -