TY  - GEN
AU  - Ramirez-hernandez, J
AU  - Li, H
AU  - Fernandez, E
AU  - McLean, Charles
AU  - Leong, Swee
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-06-01 00:06:00
DO  - https://doi.org/10.6028/NIST.IR.7236
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - A Framework for Standard Modular Simulation: Application to Semiconductor Wafer Fabrication
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822299
ER  -