TY  - JOUR
AU  - Postek, Michael
AU  - Vladar, Andras
AU  - Lowney, J
AU  - Larrabee, Robert
AU  - Keery, William
C2  - Scanning
DA  - 1998-04-01 00:04:00
LA  - en
M1  - 20(3)
PB  - Scanning
PY  - 1998
TI  - Inverse Electron Beam Modeling and Metrology Research
ER  -