TY  - CONF
AU  - Morimoto, K
AU  - Morita, L
AU  - Ohnaka, K
AU  - Dagata, John
C2  - MITI R&D Program (Quantum Functional Device Project) supported by NEDO, Kanazawa, 1, JA
DA  - 2000-11-01 00:11:00
LA  - en
PB  - MITI R&D Program (Quantum Functional Device Project) supported by NEDO, Kanazawa, 1, JA
PY  - 2000
TI  - Lateral SiOx Tunnel Barrier Formation for Si-based Tunnel Transistor Using Scanned Probe Oxidation
ER  -