TY  - JOUR
AU  - Dagata, John
AU  - Inoue, T
AU  - Itoh, J
AU  - Yokoyama, H
C2  - Applied Physics Letters
DA  - 1998-01-01 00:01:00
LA  - en
M1  - 73(2)
PB  - Applied Physics Letters
PY  - 1998
TI  - Understanding Scanned Probe Oxidation of Silicon
ER  -