TY  - SER
AU  - Tsai, V
AU  - Vorburger, Theodore
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Koning, R
AU  - Silver, Richard
AU  - Williams, Edwin
C2  - American Institute of Physics Press, New York, NY
DA  - 2005-09-29 00:09:00
LA  - en
PB  - American Institute of Physics Press, New York, NY
PY  - 2005
TI  - The Study of Silicon Stepped Surfaces as Atomic Force Microscope Calib Standards With a Calibrated AFM at NIST
ER  -