TY  - JOUR
AU  - Cresswell, Michael
AU  - Allen, Robert
AU  - Linholm, L
AU  - Guthrie, William
AU  - Penzes, William
AU  - Gurnell, A
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1997-01-01 00:01:00
LA  - en
M1  - 10(2)
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1997
TI  - Hybrid Optical-Electrical Overlay Test Structure
ER  -