TY  - CONF
AU  - Cassard, Janet
AU  - Secula, Erik
AU  - Huang, J
C2  - SEMI Technology Symposium: Innovations in Semiconductor Manufacturing, San Francisco, CA, USA
DA  - 2004-07-12 00:07:00
LA  - en
PB  - SEMI Technology Symposium: Innovations in Semiconductor Manufacturing, San Francisco, CA, USA
PY  - 2004
TI  - Round Robin for Standardization of MEMS Length and Strain Measurements
ER  -