TY  - JOUR
AU  - Marchiando, Jay
AU  - Kopanski, Joseph
C2  - Journal of Vacuum Science and Technology
DA  - 2004-02-01 00:02:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology
PY  - 2004
TI  - On calculating scanning capacitance microscopy data for a dopant profile in semiconductors
ER  -