TY  - JOUR
AU  - Newell, B
AU  - Postek, Michael
AU  - VanDerZiel, J
C2  - Journal of Vacuum Science and Technology B
DA  - 1995-11-01 00:11:00
LA  - en
M1  - 13(6)
PB  - Journal of Vacuum Science and Technology B
PY  - 1995
TI  - Fabrication Issues for the Prototype NIST SRM 2090A SEM Magnification Calibration Standard
ER  -