TY  - CONF
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Bunday, B
AU  - Bishop, M
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA
DA  - 2004-05-01 00:05:00
LA  - en
M1  - 5375
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA
PY  - 2004
TI  - Dimensional Metrology of Resist Lines Using a SEM Model-Based Library Approach
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822158
ER  -