TY  - CONF
AU  - Silver, Richard
AU  - Potzick, James
AU  - Hu, Y
C2  - Proceedings of SPIE, Santa Clara, CA, USA
DA  - 1995-05-01 00:05:00
LA  - en
M1  - 2439
PB  - Proceedings of SPIE, Santa Clara, CA, USA
PY  - 1995
TI  - Metrology with the Ultraviolet Scanning Transmission Microscope
ER  -