TY - SER AU - Read, David AU - Volinsky, Alex C2 - Kluwer, DA - 2007-01-01 00:01:00 LA - en PB - Kluwer, PY - 2007 TI - Thin Films for Microelectronics and Photonics: Physics, Mechanics, Characterization, and Reliability UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50201 ER -