TY  - JOUR
AU  - Kumon, R
AU  - Hurley, Donna
C2  - Thin Solid Films
DA  - 2005-02-23 00:02:00
LA  - en
PB  - Thin Solid Films
PY  - 2005
TI  - Effects of residual stress on the thin-film elastic moduli calculated from surface acoustic wave spectroscopy experiments
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50166
ER  -