TY  - CONF
AU  - Cassard, Janet
AU  - Read, David
AU  - Gaitan, Michael
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 2880
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE) The International Society for Optical Engineering, Microlithography and Metrology in Micromachining II, Austin, TX, USA
PY  - 1996
TI  - Analysis of Fixed-Fixed Beam Test Structures
ER  -