TY  - CONF
AU  - Allen, Richard
AU  - Oyebanjo, O.
AU  - Cresswell, Michael
AU  - Linholm, Loren
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, 1, JA
DA  - 1998-03-01 00:03:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, 1, JA
PY  - 1998
TI  - Temperature Dependence of the Modulation of Electrical Llinewidth of Single-Crystal Critical Dimension Artifacts
ER  -