TY - GEN AU - Cassard, Janet AU - Zaghloul, Mona C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1994-03-01 00:03:00 LA - en M1 - 400 PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1994 TI - Semiconductor Measurement Technology: Design and Testing Guides for the CMOS and Lateral Bipolar-on-SOI Test Library ER -