TY  - JOUR
AU  - Mayo, Santos
AU  - Suehle, John
AU  - Roitman, Peter
C2  - Journal of Applied Physics
DA  - 1993-09-01 00:09:00
LA  - en
PB  - Journal of Applied Physics
PY  - 1993
TI  - Breakdown Mechanism in Buried Silicon Oxide Films
ER  -