TY  - JOUR
AU  - Thurber, W.
AU  - Lowney, J
AU  - Larrabee, Robert
AU  - Ehrstein, James
C2  - Journal of the Electrochemical Society
DA  - 1991-10-01 00:10:00
LA  - en
M1  - 138
PB  - Journal of the Electrochemical Society
PY  - 1991
TI  - AC Impedance Method for High-Resistivity Measurements of Silicon
ER  -