TY  - CONF
AU  - Chi, P
AU  - Simons, David
AU  - Roitman, Peter
C2  - Microbeam Analysis - l988, Proc. 22nd Annual Conf. Materials Analysis Society, Milwaukee, WI, USA
DA  - 1988-12-31 00:12:00
LA  - en
PB  - Microbeam Analysis - l988, Proc. 22nd Annual Conf. Materials Analysis Society, Milwaukee, WI, USA
PY  - 1988
TI  - Artifacts Observed in Oxygen Profiles of SIMOX Samples by Secondary Ion Mass Spectrometry
ER  -