TY - JOUR AU - Clark, Anna AU - Berg, Marcel van den AU - Ullom, Joel C2 - IEEE Transactions on Applied Superconductivity DA - 2003-06-01 00:06:00 LA - en M1 - 13 PB - IEEE Transactions on Applied Superconductivity PY - 2003 TI - Fabricating NIS tunnel junctions on single crystal superconducting substrate by a lithographic process ER -