TY  - GEN
AU  - Belzer, Barbara
AU  - Ehrstein, James
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1998-08-01 00:08:00
LA  - en
M1  - 103
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1998
TI  - Conference Report: NIST Workshop on Thin Dielectric Film Metrology
ER  -