TY  - CONF
AU  - Vogel, Eric
AU  - Wortman, J.
C2  - Extended Abstracts of the Electrochemical Society, Seattle, WA, USA
DA  - 1999-10-01 00:10:00
LA  - en
PB  - Extended Abstracts of the Electrochemical Society, Seattle, WA, USA
PY  - 1999
TI  - Properties of N- and P-Channel MOSFETs with Ultrathin RTCVD Oxynitride Gate Dielectrics
ER  -