TY  - CONF
AU  - Huff, H.
AU  - Richter, Curt
AU  - Green, M.
AU  - Lucovsky, G.
C2  - 1999 Materials Research Society Symposium proceedings, Ultrathin SiO^d2^ and High-K Materials for Gate Dielectrics, San Francisco, CA, USA
DA  - 1999-04-05 00:04:00
LA  - en
PB  - 1999 Materials Research Society Symposium proceedings, Ultrathin SiO^d2^ and High-K Materials for Gate Dielectrics, San Francisco, CA, USA
PY  - 1999
TI  - Preface to Materials Research Society 1999 Proceedings
ER  -