TY - JOUR AU - Wang, Yicheng AU - Brunt, Richard Van AU - Olthoff, James C2 - Journal of Applied Physics DA - 1998-01-01 00:01:00 LA - en M1 - 83 PB - Journal of Applied Physics PY - 1998 TI - Mass Spectrometric Measurement of Molecular Dissociation in Inductively-coupled Plasmas UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=14879 ER -