TY - CONF AU - Diebold, Alain AU - Wollman, David AU - Irwin, Kent AU - Martinis, John AU - Liu, B. C2 - Proc., Fourth Intl. Symp. on Ultra Clean Processing of Silicon Surfaces (UCPSS'98), Ostend, 1, SW DA - 1998-09-01 00:09:00 LA - en PB - Proc., Fourth Intl. Symp. on Ultra Clean Processing of Silicon Surfaces (UCPSS'98), Ostend, 1, SW PY - 1998 TI - Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis ER -