TY  - CONF
AU  - Nyyssonen, D.
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II, Santa Clara, CA, USA
DA  - 1988-12-31 00:12:00
LA  - en
M1  - 921
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control II, Santa Clara, CA, USA
PY  - 1988
TI  - A New Approach to Image Modeling and Edge Detection in the SEM
ER  -