TY  - JOUR
AU  - Mayo, Santos
AU  - Schafft, Harry
C2  - Solid-State Electronics
DA  - 1995-12-31 00:12:00
LA  - en
M1  - 38
PB  - Solid-State Electronics
PY  - 1995
TI  - Electrical Characterization of Integrated Circuit Metal Line Thickness
ER  -