TY  - CONF
AU  - Simons, David
AU  - Chi, P
AU  - Downing, R.
AU  - Ehrstein, James
AU  - Knudsen, J.
C2  - Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR
DA  - 1988-12-31 00:12:00
LA  - en
PB  - Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR
PY  - 1988
TI  - Progress Toward a Semiconductor Depth-Profiling Standard
ER  -