TY  - CONF
AU  - Grievenkamp, J.
AU  - Young, M.
C2  - Proc., SPIE, Surface Characterization and Testing II,  , San Diego, CA, USA
DA  - 1989-01-01 00:01:00
LA  - en
M1  - 1164
PB  - Proc., SPIE, Surface Characterization and Testing II,  , San Diego, CA, USA
PY  - 1989
TI  - Surface Characterization and Testing II
ER  -