TY - CONF AU - Suehle, John AU - Chaparala, P C2 - Proc., Materials Research Society Symposium, Pittsburgh, PA, USA DA - 1995-12-31 00:12:00 LA - en PB - Proc., Materials Research Society Symposium, Pittsburgh, PA, USA PY - 1995 TI - Time-Dependent Dielectric Breakdown in Thin Intrinsic SiO2 Films ER -