TY  - VIDEO
AU  - Maher, Dennis
AU  - Richter, Curt
C2  - International SEMATECH Report
DA  - 2000-01-01 00:01:00
LA  - en
PB  - International SEMATECH Report
PY  - 2000
TI  - Gate Dielectric Metrology Review: Project FEPZ001 Year 2 Report
ER  -