TY  - JOUR
AU  - Sobolewski, Mark
AU  - Wang, Yicheng
AU  - Goyettes, Amanda
C2  - Journal of Applied Physics
DA  - 2002-05-01 00:05:00
LA  - en
PB  - Journal of Applied Physics
PY  - 2002
TI  - Measurements and modeling of ion energy distribution in high-density, radio-frequency biased CF4 discharges
ER  -