TY  - GEN
AU  - Christophorou, Loucas
AU  - Olthoff, James
C2  - J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1999-12-01 00:12:00
LA  - en
M1  - 28
PB  - J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1999
TI  - Electron Interactions with Plasma Processing Gases: An Update for CF<sub>4</sub>, CHF<sub>3</sub>, C<sub>2</sub>F<sub>6</sub> and C<sub>3</sub>F<sub>8</sub>
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=2666
ER  -