TY - JOUR AU - Oldham, Nile AU - Kramar, John AU - Hetrick, P. AU - Teague, E C2 - J. Amer. Soc. of Precision Engineering DA - 1993-07-01 12:07:00 LA - en PB - J. Amer. Soc. of Precision Engineering PY - 1993 TI - Electronic Limitations in Phase Meters for Heterodyne Interferometry UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=22814 ER -