TY  - CONF
AU  - Radovanov, S.
AU  - Olthoff, James
AU  - Brunt, Richard Van
C2  - Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT
DA  - 1991-07-01 00:07:00
LA  - en
PB  - Proc. of the XX Intl. Conf. on Phenomena in Ionized Gases, Barga, 1, IT
PY  - 1991
TI  - Off-Axis Measurements of Ion Kinetic Energies in RF Plasmas
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26841
ER  -