TY  - CONF
AU  - Heh, Da-Wei
AU  - Vogel, Eric
AU  - Bernstein, J
C2  - Proc., IEEE International Integrated Reliability Workshop, Lake Tahoe, CA, USA
DA  - 2002-10-21 00:10:00
LA  - en
PB  - Proc., IEEE International Integrated Reliability Workshop, Lake Tahoe, CA, USA
PY  - 2002
TI  - Defect Generation in Ultra-thin Oxide Over Large Fluence Range
ER  -