TY  - CONF
AU  - Richter, Curt
AU  - Nguyen, Nhan
AU  - Alers, G
C2  - Proc., Mater. Res. Soc. Symp. , Pittsburgh, PA, USA
DA  - 1999-09-01 00:09:00
LA  - en
PB  - Proc., Mater. Res. Soc. Symp. , Pittsburgh, PA, USA
PY  - 1999
TI  - Spectroscopic Ellipsometry of Ta<sub>2</sub>0<sub>5</sub> On Si, in Ultrathin SiO<sub>2</sub> and High-K Materials for ULSI Gate Dielectrics, edited by H. R. Huff, C. A. Richter, M. L. Green, G. Lucovsky, and T. Hattori
ER  -