TY  - JOUR
AU  - Donthu, Suresh
AU  - Alem, Nasim
AU  - Pan, Zixlao
AU  - Li, Shu-you
AU  - Shekhawat, Gajendra
AU  - Dravid, Vinayak
AU  - Benkstein, Kurt
AU  - Semancik, Stephen
C2  - IEEE Transactions on Nanotechnology
DA  - 2008-05-01 00:05:00
DO  - https://doi.org/10.1109/TNANO.2008.917793
LA  - en
M1  - 7
PB  - IEEE Transactions on Nanotechnology
PY  - 2008
TI  - Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-Electron Beam Lithography (soft-eBL)
ER  -