TY  - JOUR
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Linholm, Loren
AU  - Guthrie, William
AU  - Penzes, William
AU  - Gurnell, A.
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1997-05-01 00:05:00
LA  - en
M1  - 10
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1997
TI  - Hybrid Optical-Electrical Overlay Test Structure
ER  -